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Top-down Approach for the Direct Synthesis, Patterning, and Operation of Artificial Micromuscles on Flexible Substrates

Abstract : Recent progress in the field of microsystems on flexible substrates raises the need for alternatives to the stiffness of classical actuation technologies. This paper reports a top-down process to microfabricate soft conducting polymer actuators on substrates on which they ultimately operate. The bending microactuators were fabricated by sequentially stacking layers using a layer polymerization by layer polymerization of conducting polymer electrodes and a solid polymer electrolyte. Standalone microbeams thinner than 10 μm were fabricated on SU-8 substrates associated with a bottom gold electrical contact. The operation of microactuators was demonstrated in air and at low voltage (±4 V).
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Submitted on : Wednesday, July 6, 2022 - 3:36:58 PM
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Ali Maziz, Cedric Plesse, Caroline Soyer, Eric Cattan, Frederic Vidal. Top-down Approach for the Direct Synthesis, Patterning, and Operation of Artificial Micromuscles on Flexible Substrates. ACS Applied Materials & Interfaces, Washington, D.C. : American Chemical Society, 2016, 3, pp.1559-1564. ⟨10.1021/acsami.5b09577⟩. ⟨hal-02980109⟩

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